微结构表面精密磨削技术及其功能特性开发  

Micro and Precision Grinding Technique and Functional Behavior Development of Micro-structured Surfaces

作　　者：谢晋[1] 李萍[1] 吴可可[1] 裴晓斌[1] 刘亚俊[1] 谢海璠[1] 

机构地区：[1]华南理工大学机械与汽车工程学院,广州510640

出　　处：《机械工程学报》2013年第23期182-190,共9页Journal of Mechanical Engineering

基　　金：国家自然科学基金资助项目(51075156)

摘　　要：针对单晶硅、光学玻璃等硬脆性材料的微结构形状精度难控制的问题,开发出微磨削技术。它是利用金刚石砂轮微细尖端,控制尖端形状及其表面的微磨粒出刃形貌,在硬脆性材料表面加工出微沟槽结构阵列。为了探索其功能特性,微磨削结构表面分别被用于薄膜太阳能电池、单晶硅芯片和石墨叶片的基板表面,然后测试和分析其光伏特性、湿润性和油泵效率。加工结果表明,微磨削技术可以加工出高精度且光滑的微结构表面。应用发现,微透镜结构的薄膜电池可在弱光散光下产生较高的转化效率和填充因子,可以在无太阳照射下发电。当硅晶片表面被加工出微沟槽结构时,较大深度会导致较大的液滴接触角,而且,微沟槽结构梯度表面会产生前后接触角差,可用于控制液滴的微运动。在油泵中,当叶片微结构深度从500 m开始减小到100 m时,油泵的工作效率会逐渐增大,最后大于传统油泵的工作效率。因此,高精度且光滑的微结构表面可以产生更高附加值的功能特性。Due to the difficult control of machined micro-structured form-accuracy of hard and brittle materials such as monocrystalline silicon, optical glass and so on, a micro-grinding is developed. It utilizes the micro-tip shape of diamond wheel and the micro-grit cutting-edges on its working surface to machine the micro-groove array on hard and brittle material surface. To explore its function behaviors, it is applied to the substrate surfaces of thin film solar cell, silicon chip and graphite blades, their photovoltaic properties, wettability and pump efficiency are measured and investigated, respectively. The machining results show that the micro-grinding may produce an accurate and smooth micro-structured surface. The applications show that the thin film solar cell with micro-lens structured substrate exhibits higher conversion efficiency and fill factor in weak light and scattered light, thus it may be used to make electricity without solar irradiation. When the silicon surface is machined to be a micro-grooved structure, an increase in micro-groove depth leads to an increase in the contact angle of droplet, and gradient micro-grooved surface may drive the micro-motion of droplet. In oil pump, when the micro-grooved depth is decreased from 500 ~un to 100 Ima in the case of micro-grooved graphite blades, the work efficiency is increased gradually, finally greater than the traditional one. Therefore, the accurate and smooth micro-structured surface may produce high value-added functions.

关 键 词：微磨削 微结构表面 太阳能电池 湿润性 油泵 

分 类 号：TG161[金属学及工艺—热处理]