微机械谐振子单端口电容检测方法研究  

Research on One-port Capacitive Detecting Method for Micro-mechanical Resonator

作　　者：邢维巍[1] 谷姗姗[1] 王炜明[1] 章建军[2] 樊尚春[1,3] 

机构地区：[1]北京航空航天大学仪器科学与光电工程学院,北京100191 [2]北京航空工程技术研究中心,北京100076 [3]惯性技术国防科技重点实验室,北京100191

出　　处：《计测技术》2013年第6期20-25,共6页Metrology & Measurement Technology

基　　金：国家自然科学基金资助项目(60927005)

摘　　要：针对微机械谐振子电容信号难以检测的问题,本文采用基于频域分离的单端口静电激励/电容检测方案,并配合以隔离变压器应用技术。这种检测方式时域连续,除此,单端口检测既简化了谐振器结构,又避免了双端口检测中激励信号与检测信号存在耦合干扰的问题。实验结果表明:所设计的方案可以有效观测到梁的谐振现象并解算出谐振子的振动信息,为下一步实现单端口谐振子的闭环奠定了基础。For micro-mechanical resonator capacitance signal is difficult to detect, this paper adopts one-port electrostatic excitation and ca-pacitive detection method based on the frequency separation, coupling with the isolation transformer application technology. The measurement is time - continuous and only requires a very simple resonant structure where a single electrode is simultaneously used for excitation and detection. This method solves the problem of electrical cross - talk in two - port resonator under same - frequency excitation. On the basis of building the platform of excitation/detection system, the experiments were carried out and the third harmonic of the output current can be observed. The vibra-tion information of the resonator can be obtained through dealing the information of the third harmonic, which verifies the validity of the entire metthod. It is a foundation for realizing closed - loop of the resonator in the future.

关 键 词：微机械谐振子 单端口静电激励 电容检测 频域分离 隔离变压器 

分 类 号：TB971[一般工业技术—计量学] TP212.1[机械工程—测试计量技术及仪器]