衍射光栅机械刻划工艺理论分析与实验研究  

Theoretical Analysis and Experimental Research of Grating Mechanical Depicts Process

作　　者：张宝庆[1] 史国权[1] 石广丰[1] 蔡洪彬[1] 

机构地区：[1]长春理工大学,长春130022

出　　处：《中国机械工程》2014年第1期1-6,共6页China Mechanical Engineering

基　　金：国家自然科学基金资助项目(51075042);吉林省科技发展计划资助项目(20080534);长春理工大学科技创新基金资助项目(2021000422)

摘　　要：目前,"试刻划"加工光栅的工艺模式耗时长、效率低,且机械刻划光栅的槽形无法准确预控。通过纳米压痕实验对光栅刻划铝薄膜的微观结构及力学性能进行了表征,采用DEFORM有限元分析软件并结合正交试验对成槽过程进行了研究,通过对数据进行极差分析和单因素影响规律实验分析,建立了槽底角数学工艺模型。研究结果表明,光栅刻划过程可转化为楔体下压过程,基于有限元模拟实验的槽底角数学工艺模型可用。At present, the ＂test score＂ processing of grating process model has the characteristics of timeconsuming and low efficiency, and grating trough of mechanical characterization can＇t be pre controlled accurately. The microstructure and mechanical properties of grating score aluminum film were characterized herein through nanoindentation experiments. Formation of trough were studied by using finite element analysis software Deform combined with orthogonal tests. Trough base angle process model was established through study of the range data analysis and the effects of single factor experimental analysis of the data. The results show that, the process can be converted into grating wedge press process, based on the finite element simulation of tank base angle process model is availa ble simultaneously.

关 键 词：衍射光栅 有限元 正交试验 模型 工艺 实验 

分 类 号：TH164[机械工程—机械制造及自动化]