基于双流体动力学的微流体分配新技术  

A Novel Technology for Micro-fluid Dispensing Based on Two-phase Flow Dynamics

作　　者：张金松[1] 王志亮[1] 张建华[1] 

机构地区：[1]上海大学新型显示及应用集成教育部重点实验室,上海200072

出　　处：《中国机械工程》2014年第1期76-81,共6页China Mechanical Engineering

基　　金：国家自然科学基金资助项目(11172163);上海市科委半导体照明重大专项(09DZ1141502)

摘　　要：根据驱动原理将非接触式微流体分配技术分为间接驱动和直接驱动。现有技术采用间接驱动原理,通过驱动介质与静止流体的动能交换实现流体的运动,完成分配过程。新技术采用直接驱动原理,根据气液两相流理论,将气体和液体射流同时引入混合腔,在一定的气液流速比范围内,气体和液体射流自发在混合腔内形成气液两相断塞流,可获得均匀间隔、流型稳定的液滴和气泡,气液两相均具有体积一致的特点,可实现不同黏度液体的高频率、微体积的精确分配。According to driving principle, a mlcro--tluld dlspensmg technology can be sorted out to be the indirect driving and direct driving technologies. The common dispensing technologies used the indirect driving principle to realize the kinetic energy transferring from the movable medium to the stable liquid and spray the liquid droplets out of the nozzle to the substrate. The novel dispensing technology was presented first due to the direct driving principle, which was based on the two--phase flow dynamics. With a proper gas--liquid flow rate ratio, the gas and liquid streams entered the micro --mixing chamber simultaneously to form the stable slug flow, which contained the bubbles and drop- lets in a uniform interval and a consistent volume, respectively.

关 键 词：制造系统 微流体分配技术 直接驱动原理 双流体动力学 

分 类 号：TH16[机械工程—机械制造及自动化]