蒸发微粒气体对光的消光特性  

Light Extinction Properties of Granular Gas in Vacuum Deposition Process

作　　者：黄凯[1,2] 王志亮[1,2] 周哲玮[1,2] 张金松[3] 张建华[3] 

机构地区：[1]上海大学上海市应用数学和力学研究所,上海200072 [2]上海市力学在能源工程中的应用重点实验室,上海200072 [3]上海大学机电工程与自动化学院,上海200072

出　　处：《上海大学学报（自然科学版）》2013年第6期598-605,共8页Journal of Shanghai University:Natural Science Edition

基　　金：国家自然科学基金资助项目(11172163);上海市重点学科建设资助项目(S30106);上海市教委E-研究院建设计划资助项目

摘　　要：在真空镀膜问题中,对蒸发出的有机分子颗粒作粗粒化处理,在假定其形貌为球体粒子条件下,针对由一定数量的、随机分布的蒸发微粒组成的多粒子体系,利用电磁学广义Lorenz-Mie理论研究了该多粒子体系对光的消光特性.计算结果表明,随着主粒子粒径的增大和数量的增加,消光系数呈现出先增大后减小的趋势,体系消光系数存在极大值;当平面波入射时,入射光能量相对高斯光束具有更大的损耗.另外,讨论了不同主粒子尺寸参数下电磁场幅值的分布特性.Assume that the vapor of organic polymers in a vacuum deposition process is composed of spherical particle by coarse graining to form a multiple particle system, and consider extinction properties of light for such a system consisting of up to 3 000 randomly distributed particles. The generalized Lorenz-Mie theory from electromagnetic theory is used. The results show that, with the increase of the size and number of primary particles, the extinction coefficients go up at the beginning and fall down afterwards, indicating the presence of maximum veJlues in the extinction coefficients. The energy of a plane incident wave decays faster than that of a Gaussian wave. Properties of electromagnetic fields under different primary particle sizes are also studied.

关 键 词：广义Lorenz—Mie理论 消光特性 真空热蒸发 多粒子体系 

分 类 号：O351[理学—流体力学]