微波等离子体炬反应区的冷模测量与仿真  

Cold-model Experimental and Simulation Research of Reaction Zone of a Microwave Plasma Torch

作　　者：廖姗姗[1] 王强 张博雅[1] 王仲[1] 王博然[2] 张贵新[1] 

机构地区：[1]清华大学电机工程与应用电子技术系气体放电与等离子体实验室,北京100084 [2]康奈尔大学电气及计算机工程学院,美国纽约州伊萨卡14850

出　　处：《高电压技术》2014年第1期262-268,共7页High Voltage Engineering

基　　金：国家自然科学基金(51177085)~~

摘　　要：为了分析波导反应腔调谐参数以及微波源频率对等离子体反应区电场强度的影响,对2.45 GHz微波等离子体炬(MPT)的反应区进行了冷模测量实验,与专业高频电磁仿真软件(CST)电磁仿真进行对比,并通过热测实验验证。研究结果表明:冷模实验与仿真得到的各参数对反应区电场强度的影响规律相符,调谐最优值存在一定的偏差;该装置的能量辐射主要以磁耦合为主;在调谐圆柱总高度为45.21～50.04 mm时,反应区的电场强度较大;远离辐射孔时,微波能量迅速衰减。采用冷模实验得到的最优调谐参数,该波导装置在0.8～2.0 kW微波功率下成功激发开放稳定的氩气、氦气、氮气、空气等离子体炬。作为一种测量微波能量分布的方法,冷模实验可准确、有效地为大功率热测实验提供最优调谐参数。In order to analyze the influences of ming parameters and the frequency of microwave sources on the electric intensity of plasma reaction zone, we put forward a cold-model experiment on a 2.45 GHz microwave plasma torch（MPT）, and compared the results with CST electromagnetic simulations. It is obtained that the parameters affect the cold-model experiment with a law that well agrees with the simulation, but the optimal values of the two have certain deviations. The microwave radiation energy is mainly produced by magnetic coupling, and there is the peak of electric field strength when the total height of tuning cylinder is around 45.21-50.04 mm. When the optimal tuning parameters obtained from the cold-model experiment are adopted, MPT of various gases are produced at atmospheric pressure with low power. This ve rifies the effectiveness of cold-model experiment for obtaining the optimal tuning parameters.

关 键 词：微波 等离子体炬 反应区 冷模实验 电磁仿真 调谐 

分 类 号：O53[理学—等离子体物理]