GaSb基激光器腔面膜的材料选取及膜系设计  

Material selection and coating system design of GaSb-based laser cavity mask

作　　者：高婷[1] 曲轶[1] 徐正文 王鑫[1] 李再金[1] 

机构地区：[1]长春理工大学高功率半导体激光国家重点实验室,长春130022

出　　处：《强激光与粒子束》2014年第1期37-40,共4页High Power Laser and Particle Beams

基　　金：吉林省科技发展计划项目(20111810);国家自然科学基金委员会-中国工程物理研究院联合基金项目(U1330136)

摘　　要：为了提高GaSb基激光器腔面膜的反射率,根据有关薄膜设计理论并借助薄膜设计软件,设计出激光器腔面膜膜系.使高反膜在2.0～3.5 μm波段的理论反射率高于95％;增透膜在波长为2.5 μm处的理论透射率高于99％.并经过反复实验操作比较了实验与理论设计反射率曲线,结果表明,实验所得反射率能达到实际应用的要求.除此之外,还通过比较各种材料的特性,讨论了薄膜材料的选取.In order to improve the reflectance of the GaSb-based laser cavity mask,the laser cavity film was designed in accordance with the relevant film design theory and by film-design software.The reflectance of the high anti-reflection film was higher than 95％ in the band of 2-3.5 μm; the transmittance of the antireflective film was higher than 99％ at the wavelength of 2.5 μm.The theoretical and experimental reflectance curves of high reflector and the single layer antireflection coating were compared through repeated experiments.Though the experimental results did not reach the theoretical value,they could meet the requirements of the application.The selection of the film materials was discussed by comparison of various material properties.

关 键 词：薄膜设计 GaSb基激光器 激光器腔面膜 薄膜材料 

分 类 号：TN219[电子电信—物理电子学]