在扫描电镜上实现STEM模式的一种方法及应用  

A KIND OF METHOD AND ITS APPLICATION FOR STEM MODE IN SEM

作　　者：周固[1] 陈晓波[1] 

机构地区：[1]北京师范大学分析测试中心,北京100875

出　　处：《北京师范大学学报（自然科学版）》2013年第6期578-581,共4页Journal of Beijing Normal University(Natural Science)

基　　金：中央高校基本科研业务费专项资金重大项目(212-105560GK)

摘　　要：在扫描电子显微镜上实现STEM模式通常需要有一个扫描透射样品座和一个扫描透射信号的接收装置.本方法是在扫描电镜样品台上安装一个自行设计的安装薄样品的样品支架,利用扫描电镜内已有的二次电子检测器来检测扫描透射电子就可以实现STEM明场像的观察和X射线能谱分析.该方法不需要在扫描电镜里另外加装透射信号接收装置.The conventional transmitted electron detecting system consists the specimen holder and signal receiver for STEM in the SEM. The stub is designed for sustaining specimen and reflecting transmitted electrons in this method. The STEM image could be acquired using the special stub on the holder and secondary electron detector in the SEM. The examination may also be coupled with X-ray microanalysis equipment for the acquisition of elemental information and distribution. It is not need the transmitted electron detector in SEM.

关 键 词：扫描透射模式 扫描电子显微镜 方法 样品支架 

分 类 号：TN16[电子电信—物理电子学]