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作 者:王晓 连洁 张福军 高尚 陈延学 于晓红 李萍 王英顺 孙兆宗
机构地区:[1]Shandong University, Department of Optical Engineering [2]Shandong University, School of Physics and Microelectronics
出 处:《Chinese Physics B》2014年第1期417-422,共6页中国物理B(英文版)
基 金:Project supported by the National Basic Research Program of China(Grant No.2009CB929400);the Independent Innovation Foundation of Shandong University,China(Grant No.2012ZB040)
摘 要:The longitudinal generalized magneto-optical ellipsometry (GME) method is extended to the measurement of three- layer ultrathin magnetic films. In this work, the theory of the reflection matrix is introduced into the GME measurement to obtain the reflective matrix parameters of ultrathin multilayer magnetic films with different thicknesses. After that, a spectroscopic ellipsometry is used to determine the optical parameter and the thickness of every layer of these samples, then the magneto-optical coupling constant of the multilayer magnetic ultrathin film can be obtained. After measurements of a series of ultrathin Fe films, the results show that the magneto-optical coupling constant Q is independent of the thickness of the magnetic film. The magneto-optical Kerr rotations and ellipticity are measured to confirm the validity of this experiment. Combined with the optical constants and the Q constant, the Kerr rotations and ellipticity are calculated in theory. The results show that the theoretical curve fits very well with the experimental data.The longitudinal generalized magneto-optical ellipsometry (GME) method is extended to the measurement of three- layer ultrathin magnetic films. In this work, the theory of the reflection matrix is introduced into the GME measurement to obtain the reflective matrix parameters of ultrathin multilayer magnetic films with different thicknesses. After that, a spectroscopic ellipsometry is used to determine the optical parameter and the thickness of every layer of these samples, then the magneto-optical coupling constant of the multilayer magnetic ultrathin film can be obtained. After measurements of a series of ultrathin Fe films, the results show that the magneto-optical coupling constant Q is independent of the thickness of the magnetic film. The magneto-optical Kerr rotations and ellipticity are measured to confirm the validity of this experiment. Combined with the optical constants and the Q constant, the Kerr rotations and ellipticity are calculated in theory. The results show that the theoretical curve fits very well with the experimental data.
关 键 词:generalized magneto-optical ellimpsometry magneto-optical coupling constant
分 类 号:TB383.2[一般工业技术—材料科学与工程]
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