WO_(3)-SnO_(2)薄膜的溶胶-凝胶制备及其气敏特性研究  

Preparation of WO_(3)-SnO_(2) thin films by the sol-gel process and their gas sensitivities

作　　者：方国家[1,2] 王汉忠[2] 木昌洪[2] 吉向东[2] 刘祖黎[1] 

机构地区：[1]华中科技大学物理系,湖北武汉430074 [2]襄樊学院物理系,湖北襄樊441053

出　　处：《郑州轻工业学院学报》2000年第4期52-55,共4页Journal of Zhengzhou Institute of Light Industry（Natural Science）

基　　金：湖北省教育厅重点资助项目(97A085)。

摘　　要：以无机盐SnCl2·2H2O为主体原料、H2WO4为掺杂剂、无水乙醇为溶剂，采 用溶胶-凝胶工艺制备了nW∶nSn=1∶100的WO3-SnO2薄膜，并对其 气敏性能进行研究．实验表明，掺杂量为1%的WO3-SnO2薄膜在常温下对H2S，NO x气体具有较好的气敏性能，对H2S气体的敏感温度为100 ℃，对NOx气体的最佳 敏感温度为70 ℃．WO3-SnO2 thin films nW∶nSn=1∶100 have been prepared wit h SnCl2·2H2O as main materials, H2WO4 as dopant, H2O2 and ethanol a s solvent, by the sol-gel process. The gas sensitive properties of WO3-SnO 2 thin films have been studied. It is illustrated that the WO3-SnO2 film s have good gas sensitivity toward NOx, H2S at room temperature. The bes t working temperature of WO3\|SnO2 gas sensor to H2S is 100 ℃, and that t o NOx is 70 ℃.

关 键 词：气敏器件 氧化钨 氧化锌 溶胶-凝胶法 薄膜 

分 类 号：TN389[电子电信—物理电子学]