Deposition of Polymer Thin Film Using an Atmospheric Pressure Micro-Plasma Driven by Dual-Frequency Excitation  

作　　者：王晓敏 袁强华 周永杰 殷桂琴 董晨钟 

机构地区：[1]Key Laboratory of Atomic and Molecular Physics & Functional Materials of Gansu Province,College of Physics and Electronic Engineering,Northwest Normal University

出　　处：《Plasma Science and Technology》2014年第1期68-72,共5页等离子体科学和技术（英文版）

基　　金：supported by National Natural Science Foundation of China(No.11165012);China Postdoctoral Science Foundation Funded Project(2011M501494;2012T50831);Project of Key Laboratory of Atomic and Molecular Physics&Functional Materials of Gansu Province;Project of Northwest Normal University(NWNU-LKQN-11-9)

摘　　要：Polymer thin film deposition using an atmospheric pressure micro-plasma jet driven by dual-frequency excitations is described in this paper. The discharge process was operated with a mixture of argon （6 slm） and a small amount of acetone （0-2100 ppm）. Plasma composition was measured by optical emission spectroscopy （OES）. In addition to a large number of Ar spectra lines, we observed some spectra of C, CN, CH and C2. Through changing acetone content mixed in argon, we found that the optimum discharge condition for deposition can be characterized by the maximum concentration of carbonaceous species. The deposited film was characterized by scanning electron microscopy （SEM） and X-ray photoelectron spectroscopy （XPS） and Fourier transform infrared （FTIR） spectroscopy. The XPS indicated that the film was mostly composed of C with trace amount of O and N elements. The FTIR suggested different carbon-containing bonds （-CHx, C=O, C=C, C-O-C） presented in the deposited film.Polymer thin film deposition using an atmospheric pressure micro-plasma jet driven by dual-frequency excitations is described in this paper. The discharge process was operated with a mixture of argon （6 slm） and a small amount of acetone （0-2100 ppm）. Plasma composition was measured by optical emission spectroscopy （OES）. In addition to a large number of Ar spectra lines, we observed some spectra of C, CN, CH and C2. Through changing acetone content mixed in argon, we found that the optimum discharge condition for deposition can be characterized by the maximum concentration of carbonaceous species. The deposited film was characterized by scanning electron microscopy （SEM） and X-ray photoelectron spectroscopy （XPS） and Fourier transform infrared （FTIR） spectroscopy. The XPS indicated that the film was mostly composed of C with trace amount of O and N elements. The FTIR suggested different carbon-containing bonds （-CHx, C=O, C=C, C-O-C） presented in the deposited film.

关 键 词：atmospheric pressure plasma dual-frequency excitation polymer thin film 

分 类 号：TB43[一般工业技术]