单级衍射量子点阵光栅的聚焦离子束直写法制备及光学性能检测  

Fabrication and optical property characterization of quantum-dot-array diffraction grating with single order diffraction based on focused ion beam

作　　者：黄成龙[1,2,3] 张继成[3] 刁凯迪[3] 曾勇[3] 易勇[1,2] 曹磊峰[3] 王红斌[3] 

机构地区：[1]西南科技大学,四川省非金属复合与功能材料重点实验室-省部共建国家重点实验室培育基地,绵阳621010 [2]西南科技大学,极端条件物质特性实验室,绵阳621010 [3]中国工程物理研究院,激光聚变研究中心,绵阳621900

出　　处：《物理学报》2014年第1期332-336,共5页Acta Physica Sinica

基　　金：四川省非金属复合与功能材料重点实验室开放基金(批准号:11zxfk19)资助的课题~~

摘　　要：采用聚焦离子束直写技术,成功制作了面积为200μm×200μm,线密度500 mm 1,圆孔直径800 nm,金吸收体厚度为500 nm的单级衍射量子点阵光栅.研究了该光栅在波长442 nm激光下不同传输距离的衍射特性以及相对衍射效率.实验结果表明,量子点阵光栅不存在高级衍射,只保留了±1级和0级衍射,具有良好的单级衍射特性.1级衍射与0级衍射间距随传输距离的增大而增大,实测值与理论计算值相符.Quantum-dot-array difraction grating（QDADG）,with an area of 200 μm×200 μm,a line density of 500 line/mm,an aperture size of 800 nm and a gold absorber of 500 nm thick,is successfully fabricated by focused ion beams.The difraction properties and relative difraction efciencies of QDADG are measured at diferent transfer distance for 442 nm laser.It is shown that the high-order difraction is removed from the spectra with only the ±1 and 0 order difraction lines reserved.Moreover,in accordance with the calculated values obtained using the grating equation,variations of space between the 1storder and the 0thorder increase gradually with the increase of transfer distance.

关 键 词：聚焦离子束直写加工(FIB) 量子点阵光栅(QDADG) 单级衍射 

分 类 号：O413[理学—理论物理]