低温泵快速再生系统研究  

Novel Heating-Up Technique for Rapid Regeneration of Cryopump

作　　者：冯驹先 谭昱全 张霖[1] 王硕[1] 徐飞[1] 徐中堂[2] 干蜀毅[1] 

机构地区：[1]合肥工业大学机械与汽车工程学院,合肥230009 [2]电子工业部第十六研究所,合肥230009

出　　处：《真空科学与技术学报》2014年第1期25-27,共3页Chinese Journal of Vacuum Science and Technology

摘　　要：低温泵在当今生产研究过程中应用广泛,但其每工作一段时间后都需要进行"再生",所需时间长,泵效率低。本文对一种低温泵的吸附阵结构分析并设计了一种结合自动控制功能的快速再生加热系统,该系统由单片机编程控制,自动化程度高,再生时间短,使用方便,为国内低温泵快速再生环节的发展提供借鉴。A novel technique was developed to improve the regeneration of cryo-ptunps. The newly-developed heat- ing-up technique uses an automatic control unit with a single chip microprocessor, and a resistively heating wire, which was installed in such a simple way that it directly heats up the absorption army rapidly,because of the close thermal con- tact between them, and because it has negligible impacts on temperature of other parts in the cryo-pump. The temperature distribution of the absorption arrays, heated up at 100 W for 20 min, was simulated. The simulated results show the many advantages of the heat-up unit, including the uniform heating, small temperature gradient, high heating efficiency, little impact on the cold head, and much shorter regeneration time, etc.

关 键 词：低温泵 快速再生 加热结构 自动化 

分 类 号：TH36[机械工程—机械制造及自动化]