低频频率和O_2含量对双频容性耦合等离子体Ar-O_2放电的影响  

The Influence of Low-frequency Frequency and Oxygen Content in Ar-O_2 Dual-frequency Capacitively Coupled Plasmas

作　　者：蒋相站[1] 张季[1] 李文亮[1] 姚洪斌[1] 刘永新[2] 刘佳[2] 

机构地区：[1]新疆工程学院新能源材料研究教育厅重点实验室,乌鲁木齐830091 [2]大连理工大学物理与光电工程学院,大连116024

出　　处：《科学技术与工程》2014年第1期41-44,58,共5页Science Technology and Engineering

基　　金：国家自然科学基金重点项目(10635010);新疆工程学院科研基金(2011XGZ091312)资助

摘　　要：利用四极杆质谱仪研究了Ar/O2混合气体放电中低频频率和O2含量对离子能量分布和平均能量的影响。研究结果表明当低频频率增大时,离子能量逐渐由中频机制向高频机制变化,其能量分布的马鞍型双峰结构逐渐收缩,变得不明显。Ar+离子由于共振电荷交换的影响获得更多的低能离子,其平均能量比O2+离子的稍低。增大氧气含量,电离率增大,Ar+离子和O2+离子的高低能峰均向高能区移动,最大能量值逐渐右移。同等条件下的Ar+离子的平均能量均低于O2+离子。The ion energy distribution and average energy of Ar/O2 mixed gas discharge are investigated using quadrupole mass spectrometer. The low-frequency frequency and oxygen content can influence Ar^＋ and O2^＋ions. The results show that when low-frequency frequency increases, the ion energy changes from middle-frequency to high-frequency mechanism, the energy width of Ar^＋ andO2^＋ ions decrease, bimodal structure becomes vaguely. The oxygen content increases, ionization rate increases, high energy peaks of Ar^＋ and O2^＋ ions move to high energy area, the maximum energy value gradually shifts to high energy area. The average energy of Ar^＋ ions is lower than the O2^＋ ions under the same condition.

关 键 词：双频容性耦合等离子体 四极杆质谱 离子能量分布 平均能量 

分 类 号：TN136[电子电信—物理电子学] O534[理学—等离子体物理]