时栅角位移传感器误差分离与建模方法研究  

Study on the Method of Error Separation and Modeling for Time Grating Angular Displacement Sensor

作　　者：高忠华[1,2] 彭东林[1,2] 陈锡侯[2] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,安徽合肥230009 [2]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054

出　　处：《测控技术》2014年第2期1-3,7,共4页Measurement & Control Technology

基　　金：国家自然科学基金资助项目(51205434;51005263;51275551)

摘　　要：为实现时栅角位移传感器的误差分离,进而对其误差进行修正,提高时栅角位移传感器的测量精度,采用多路信号叠加原理,针对时栅角位移传感器的定子和转子在加工过程中存在的误差进行分离,消除了大部分的长周期误差,并对分离出来的误差成分进行谐波分析,建立误差修正模型,利用该模型对时栅角位移传感器的定子和转子的线槽分度误差进行修正,修正后的场式时栅角位移传感器的测量精度显著提高,精度优于±2"。实验证明,这种误差分离的方法对消除圆周分度误差十分有效,所建立的误差修正模型对传感器误差修正效果明显。A method based on the principle of multiple signal superposition is presented to realize the error sep- aration of time grating angular displacement sensors. The measurement accuracy of time grating sensors is im- proved by correcting the separated errors. Errors caused during manufacturing stators and rotors of time grating angular displacement sensors are separated, and majority long-periodic errors are removed. Thus, error correc- tion model is made by using the harmonic analysis of these separated errors. Indexing errors of wire slots of sta- tots and rotors of time grating sensors are corrected by using this model. The accuracy of the field-type time grating is improved significantly by using the error correction model. The precise is better than ±2＂ after cali- brating. Experiments prove that the method of error separation is very effective for removing indexing errors, and the effect of the established error correction model is obvious in calibrating errors of time grating angular displacement sensors.

关 键 词：时栅 误差分离 误差模型 误差修正 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]