磁悬浮转子规在分压力测量中的应用  

APPLICATION OF SPINNING ROTOR GAUGE IN PARTIAL PRESSURE MEASUREMENT

作　　者：李得天[1] 冯焱[1] 李正海[1] 

机构地区：[1]兰州物理研究所,甘肃兰州730000

出　　处：《真空与低温》2000年第4期225-229,共5页Vacuum and Cryogenics

摘　　要：分析了磁悬浮转子规的测量特点，指出在分子流范围内，不同气体成分引起的磁悬浮转子规转速衰减率具有可线性迭加性。提出了磁悬浮转子规用于分压力测量的 2种方法，并给出了实验结果。The measurement characteristic of SRG was analyzed, and the conclusion was that the rates of the rotational decay of SRG caused by the different gas species could be added up in the molecular flow regime. Two methods that SRG could be used to measure partial pressures were introduced and the experimental results were presented.

关 键 词：磁悬浮转子规 分压力 测量 质谱计 校准 

分 类 号：TH842.06[机械工程—仪器科学与技术]