纳米时栅传感器数字信号处理系统设计  

Digital Signal Processing System for Nanometer Time Grating Sensor

作　　者：于治成[1,2] 郑方燕[1,2] 冯济琴[1,2] 蒲红吉[1,2] 凌旭[1,2] 

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心 [2]时栅传感及先进检测技术重庆市重点实验室,重庆400054

出　　处：《传感技术学报》2013年第11期1548-1551,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(51175534);重庆市教委科学技术研究项目(KJ130816);重庆理工大学研究生创新基金项目(YCX2013213)

摘　　要：针对大量程纳米级精度测量难的问题,结合时栅传感器的基本原理,提出一种基于交变电场耦合的纳米时栅传感器。利用Nutt内插法对影响时栅精度的关键因素—时间量进行精密测量,降低了系统对插补脉冲频率的要求,提高了测量分辨率。采用SOPC技术设计纳米时栅信号处理系统,保证了系统高性能实时测量。实验结果表明,该系统能稳定正常工作,在行程200 mm测量范围内,纳米时栅误差峰峰值为590 nm。Aiming at the difficulty of the large range nano-precision measurement, this paper proposed the nanometer time grating sensor based on an alternating electric field by referring to the principle of time grating sensor. Nutt in- terpolation method is used to promote precisely time measurement which the key factor of time grating sensor. In this way the requirement of interpolation pulse＇s frequency is reduced and the measuring resolution is improved. Using the SOPC technology, the nanometer time grating sensor signal-process system performs well in real-time. Experimental results show that the system can work steadily, and the measurement peak-to-peak value is only 590 nm within 200 mm measuring range.

关 键 词：纳米测量 时栅 内插法 可编程片上系统 信号处理 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置]