Room-temperature NH_3 sensors with high sensitivity and short response/recovery times  

作　　者：Qingcheng Liang Di Li Shang Gao Dayong Jiang Jianxun Zhao Jieming Qin Jianhua Hou 

机构地区：[1]School of Materials Science and Engineering, Changchun University of Science and Technology

出　　处：《Chinese Science Bulletin》2014年第4期447-451,共5页

基　　金：supported by the National Nat-ural Science Foundation of China(61106050,21201022,61205038);the Science Foundation for Young Scholars of Changchun University of Science and Technology(XQNJJ-2011-12);the Scientific and Technological Development Project of Jilin Province(201101103,201201121,20120435,20130203033GX);the Scientific and Technological Pillar Project of Changchun(11KZ38)

摘　　要：Micro-sensors are fabricated by co-electrospinning In2O3and SnO2nanofibers on the substrates of SiO2/Si with interdigitated Pt signal electrodes.The total sensor area is 1.36 mm 9 0.55 mm and the active area is only0.63 mm 9 0.55 mm.Excellent NH3sensing properties are obtained based on the sensors at room temperature.The sensitivity is at most 28 when the sensors are exposed to NH3of 10 ppm.The response time is 8 s or so and the recovery time is nearly 2 s.Not only fine selectivity,but also longtime stability is obtained.The results not only demonstrate the obtained micro-sensors are very promising devices for NH3detection,but also show a possible route for large-scale NH3sensor fabrication at the industrial level.Micro-sensors are fabricated by co-electrospin- ning In203 and SnO2 nanofibers on the substrates of SiO2/Si with interdigitated Pt signal electrodes. The total sensor area is 1.36 mmx 0.55 mm and the active area is only 0.63 mmx 0.55 ram. Excellent NH3 sensing properties are obtained based on the sensors at room temperature. The sensitivity is at most 28 when the sensors are exposed to NH3 of 10 ppm. The response time is 8 s or so and the recovery time is nearly 2 s. Not only fine selectivity, but also long- time stability is obtained. The results not only demonstrate the obtained micro-sensors are very promising devices for NH3 detection, but also show a possible route for large-scale NH3 sensor fabrication at the industrial level.

关 键 词：微传感器 恢复时间 高灵敏度 快速响应 室温 NH3 SIO2 Si 器具 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]