TFA-MOD法制备多层YBCO超导薄膜的特性研究  

Research on the Characteristics of Multilayer YBCO Superconducting Film Prepared with TFA-MOD Method

作　　者：陈晋[1] 

机构地区：[1]北京工业职业技术学院教务处,北京100042

出　　处：《稀有金属与硬质合金》2014年第1期34-37,共4页Rare Metals and Cemented Carbides

摘　　要：采用TFA-MOD法在LaAlO3单晶基片上制备出了五层YBa2Cu3O7-δ薄膜,膜层总厚度为1!m,临界电流密度Jc达到1.6MA/cm2,临界电流Ic为160A/cm。单层膜与三层膜的Jc值分别为3.5、1.75 MA/cm2;三层膜和五层膜截面TEM形貌中均无裂纹和明显空洞产生,各层之间的界面平滑。随着膜层厚度的增加,临界电流密度降低,主要原因可能是膜性能的劣化。Five-layer YBa2Cu3O7-δ film was prepared on LaAlO3 single crystal substrate by TFA-MOD, with total film thickness of 1 μm,critical current density （Jc） of 1.6 MA/cm^2 and critical current （L） of 160 A/cm. The Jc values of single-layer film and three-layer film are 3.5 MA/cm^2 and 1.75 MA/cm^2 ,respectively. No cracks and obvious pores are observed in cross-sectional TEM images of three-layer film and five-layer film, and interfaces among the layers are smooth. With the increase of film thickness, critical current density decreases ,probably caused by film performance degradation.

关 键 词：YBCO超导薄膜 TFA-MOD法 LaAlO3单晶基片 临界电流 临界电流密度 

分 类 号：TB43[一般工业技术]