基于AlN轮廓模式矩形盘谐振器的研究  

Study on the Resonator of AlN Contour-mode Rectangle Plate

作　　者：郑升灵[1] 李丽[1] 要志宏[1] 李宏军[1] 李丰[1] 

机构地区：[1]中国电子科技集团公司第十三研究所十六专业部,河北石家庄050051

出　　处：《压电与声光》2014年第1期1-3,共3页Piezoelectrics & Acoustooptics

摘　　要：介绍了一种微型化体声波谐振器的理论模型和实作结果,采用微电子和微机械加工技术,实现了一种上、下电极覆盖压电AlN的"三明治"空气腔悬梁结构。该谐振器具有微型化,高品质因数,低成本的特点,实作的谐振器频率约20MHz,品质因数为800,机电耦合系数约0.5%。This paper reports on theory modeling and experimental verification of a miniature resonator of bulk acoustic wave.An AlN sandwiched air-cavity cantilever structure between a bottom electrode and a top electrode is fabricated by using the microelectronic and micromechanical technology.The resonator has the features of miniature,high Q and low cost.The resonant frequency of the fabricated resonator is 20 MHz,Q is about 800 and the electromechanical coupling coefficient is about 0.5 ％.

关 键 词：氮化铝(AlN) 轮廓模式 体声波 矩形盘谐振器 

分 类 号：TN75[电子电信—电路与系统]