钆的激光诱导击穿光谱原位统计分布分析  

Original Opposition Statistic Distribution Analysis Combined with Laser Induced Breakdown Spectrometry for Metal Gadolinium

作　　者：李冬玲 张勇 王海舟 苗睿瑛[2] 

机构地区：[1]中国钢研科技集团有限公司,钢研纳克检测技术有限公司,北京100081 [2]北京有色金属研究总院,有研稀土新材料股份有限公司,北京100088

出　　处：《中国稀土学报》2014年第1期76-83,共8页Journal of the Chinese Society of Rare Earths

基　　金：2011年科技部创新方法专项(2011IM010600)资助

摘　　要：采用LIBS-OPA对取自不同电迁移部位的金属钆棒的纵剖面进行了原位统计分布分析,探讨了电迁移工艺中不同位置处的杂质元素在其电迁移方向上的分布规律。发现在电迁移工艺上部Ti和Cu的偏析较为严重,而下部即阴极附近的杂质元素含量大大降低且其分布趋于均匀。Ti和Al两个元素在电迁移末端含量发生较大变化,出现了一条明显的分界线,说明金属钆中的某些成分组成发生了突变,因此导致其分布发生了较大改变。而Cu,Si,Mo和Fe强度也都发生了不同程度的下降。但其偏析度变化不明显。Ti和Mo是金属钆的原位分析中出现异常信号较多的元素,说明金属Gd中存在一些Ti和Mo的化合物。采用透射电镜对金属钆棒中的化合物进行了观察,其结果与LIBS-OPA统计的结果较为相符。The longitudinal section of gadolinium rods from different part of the electro migration process was analyzed by LIBS-OPA technology. The distribution law of different trace impurity element in the direction of electro migration process was investigated. It was found that at the beginning of the electro migration process the segregation of Ti and Cu are serious and at the end of the process the distribution of the most of the impurity elements got more homogeneous. At the end of the process the contents of Ti and A1 varied greatly and there was an obvious boundary appearedIt showed that some compositions in Gd sample were changed so that the distribution of Ti and A1 varied greatly. The intensities of Cu, Si, Mo and Fe were decreased at different degree, but the change of the segregation degree of these elements was not obvious. There were a lot of abnormal high signals for Ti and Mo in the analysis of Gd rods and it could conclude that some compound of Ti and Mo existed in the sam- ple. The compound in Gd rod was also investigated by transmission electron microscope and the result had good agreement with the data from LIBS-OPA

关 键 词：钆 激光诱导击穿光谱法 原位统计分布分析 电迁移 杂质元素 

分 类 号：O657.31[理学—分析化学]