ZrO_2膜的相结构与显微组织  

Crystal Structure and Microstructure of ZrO_2 Thin Film

作　　者：娄彦良[1] 肖文凯 

机构地区：[1]华中科技大学材料学院,武汉430074 [2]武汉水电科技大学,武汉430073

出　　处：《化学工程师》2000年第6期62-63,共2页Chemical Engineer

摘　　要：本文用Ｘ射线衍射和扫描电镜研究了ＺｒＯ２膜的晶体结构和显微组织。结果表明ＺｒＯ２膜的相结构为立方氧化锆（ｃ－ＺｒＯ２），晶粒尺寸细微。发现ＺｒＯ２膜中存在具有｛１１１｝面织构的柱状晶结构，这种结构可用基片负偏压消除。The crytical struture and microstructrue of ZrO2 thin film were investigated by means of x - ray diffraction and scanning electron microscopy in this paper. The result show that the crytical structure of ZrO2 film is cubic Zirconia (c - ZrO2) structure and the grain size is very fine. A Columnar structure with {111} plane texture was oberserved and it can be subdued with - 70 substrate bias.

关 键 词：氧化锆 相结构 显微组织 固体电解质电池 

分 类 号：TM911.3[电气工程—电力电子与电力传动] TQ134.12[化学工程—无机化工]