加工误差对马氏理论关于超微孔微穿孔板吸声结构适用性的影响  

Effect of machining error on accuracy of Maa's theory for micro-perforated panel absorbing constructions with ultra-micro orifices

作　　者：钱玉洁[1,2] 崔珂[3] 刘淑梅[1,2] 刘友江[1,2] 孙少明[4] 

机构地区：[1]中国科学院合肥智能机械研究所,合肥230031 [2]中国科学技术大学自动化系,合肥230026 [3]中国科学技术大学近代物理系,合肥230027 [4]中国科学院先进制造技术研究所,常州213164

出　　处：《声学学报》2014年第2期235-242,共8页Acta Acustica

基　　金：国家重点基础研究发展规划项目973计划(2011CB302104);国家自然科学基金(51005223)资助

摘　　要：从理论和实验上探讨了加工误差对马氏理论关于超微孔微穿孔板（micro-perforated panel，MPP）吸声结构适用性的影响。建立了计及加工误差的MPP理论分析模型，并应用MEMS工艺制作了超微孔MPP，由于工艺本身存在一定的加工误差，造成实际孔径与设计孔径10％-20％的偏差，在阻抗管中测量得到其垂直入射吸声系数。将实验结果和计及加工误差的理论预测值与马氏理论预测值进行对比发现，差别均较小，最大误差仍在6％以内，说明马氏理论在计及加工误差的情况下仍然适用。此外，对马氏理论关于加工误差的适用极限进行了仿真计算，结果表明，适用极限的大小具体依赖于超微孔MPP的孔径大小。The effect of machining error on accuracy of Maa＇s theory for micro-perforated panel （MPP） with ultramicro orifices is discussed theoretically and experimentally in this article. The theoretical analysis model of MPP on considering the effect of machining error is built and a series of MPPs with ultra-micro orifices are fabricated based on the MEMS technology, but the deviation of 10%~20% is made between the actual orifice diameter and the designed orifice diameter due to the machining error. Their normal absorption coefficients were tested in impedance tube. Results show that the measurements and the predictions calculated by the theoretical analysis model on considering the effect of machining error compare well with the calculations based on Maa＇s theory with the maximum error being less than 6%, which indicates that Maa＇s theory is still available on considering the effect of machining error. In addition, the limitation of Maa＇s theory for machining error is discussed through simulation, results reveal that it depends on the pore size of MPPs with ultra-micro orifices.

关 键 词：加工误差 吸声结构 微穿孔板 适用性 微孔 孔径大小 工艺制作 MPP 

分 类 号：TB30[一般工业技术—材料科学与工程]