TiO_2纳米薄膜的制备与氧敏性能的研究  

STUDY ON PREPARATION OF NANO-TiO_2 FILM AND ITS OXYGEN-SENSING CHARACTER

作　　者：谢少桥[1] 徐廷献[1] 徐明霞[1] 

机构地区：[1]天津大学材料学院,天津300072

出　　处：《天津大学学报（自然科学与工程技术版）》2000年第6期802-805,共4页Journal of Tianjin University：Science and Technology

基　　金：国家基金重大项目! 5999552 0 - 6;863计划新材料领域! 71 5- 0 1 2 - 0 1 50资

摘　　要：本文通过 Sol- gel法在 Al2 O3基片上制得了 Ti O2 纳米薄膜 ,经 XRD分析 ,薄膜具有多晶结构 ,其主晶相为金红石 .本实验还对 Ti O2 薄膜的氧敏特性进行了研究 ,实验结果表明 ,Ti O2 纳米薄膜在 80 0℃下具有良好的氧敏特性和重复性 。This paper describes the preparation of TiO 2 film on Al 2O 3 substrates by the Sol-gel method.The results of XRD analysis show that the TiO 2 film has a poly-crystal structure and its primary crystal is rutile.In this paper the oxygen-sensing character of TiO 2 film is also studied.The results of experiments indicate that the TiO 2 film has a good oxygen-sensing character and reproducibility at work temperature of 800 ℃ and excellent response time.

关 键 词：SOL-GEL法 纳米薄膜 氧敏特性 响应时间 TIO2纳米 

分 类 号：TB383[一般工业技术—材料科学与工程]