一种CO_2激光快速加工玻璃微透镜的方法  

Rapid Fabrication of Glass Micro-Lens Array by Using CO_2 Laser

作　　者：刘先晖[1] 陈涛[1] 郑崇[1] 梁晓莉[1] 

机构地区：[1]北京工业大学激光工程研究院,北京100124

出　　处：《应用激光》2014年第1期62-66,共5页Applied Laser

基　　金：国家重大科学仪器设备开发专项资助项目(项目编号:2011YQ030112);北京市教育委员会科技计划重点项目(项目编号:KZ201210005009)

摘　　要：提出了一种新的制造微透镜的制作方法。该方法基于CO2激光与玻璃材料的热透镜效应,在玻璃基片上制作微透镜阵列,是一种低成本、高效率的制备玻璃微透镜阵列的方法。采用CO2激光照射在模板上,模板上通光部分为圆孔阵列,利用金属孔阵模板进行选择性投影扫描加工,通过实验数据分析,合理的控制离焦距离,激光功率和辐照时间,可以制造微透镜阵列。最后用共聚焦显微镜及光纤探针扫描仪对微透镜的轮廓及聚焦光斑进行了检测,样品的轮廓曲线较为平滑、对称,且具有较好的聚光能力,证实了该方法的可行性与可靠性。This paper presents a new method to fabricate a micro-lens array by using CO2 laser. The method of micro lens array fabrication on a glass slice with a CO2 Iaseris based on the thermal lensing effect. By using this method, a low cost and highly efficient way to fabricate a micro lens array on a glass slice could be obtained. After laser scanning on a metal mask which has a circular aperture array, a micro lens array could be successfully formed. Then series of experimental data were analyzed after optical detections. Therefore the control of the defocus distance, laser power and irradiation time could be setted up reasonably. The contour and its focused spots of the sample micro-lens array were finally detected by a confocal microscopy and a spot probe scanning microscope respectively. The images of the detected contour of the microqens array are of well smoothness and sym metry. This method is thus confirmed to be a feasible and reliable method to fabricate micro-lens arrav.

关 键 词：玻璃 微透镜阵列 热透镜效应 共聚焦显微镜 光斑探针扫描仪 

分 类 号：TN249[电子电信—物理电子学]