高功率准分子激光MOPA系统光束平滑技术研究  

Technical Study on Beam Smoothing of High Power Excimer Laser MOPA System

作　　者：王大辉[1] 赵学庆[1] 薛全喜[1] 张永生[1] 胡云[1] 朱永祥[1] 易爱平[1] 赵军[1] 

机构地区：[1]西北核技术研究所激光与物质相互作用国家重点实验室,陕西西安710024

出　　处：《光学学报》2014年第2期144-150,共7页Acta Optica Sinica

基　　金：国家863计划;激光与物质相互作用国家重点实验室基金(SKLLIM1106)

摘　　要：在充分调研大型激光系统多种光束平滑技术基础上,针对高功率准分子激光系统波长短、宽频带等特点,选用了无阶梯诱导空间非相干(EFISI)技术来实现角多路高功率准分子激光系统的平滑化。利用前端部分相干散射源和严格的像传递光路,开展了光束经预放大器1三程放大和预放大器2双程放大实验,研究了光束动态均匀性。实验结果表明,基于EFISI技术的平滑方法较好地保持了散射源的光束均匀性,经预放大器1放大后不均匀性为2.04%,经预放大器2放大后不均匀性为1.96%,能够满足高功率XeCl准分子激光角多路系统建设需求。High power excimer laser system has its outstanding features such as short wavelength, broad bandwidth, et at. On the basis of adequate study of numbers of beam smoothing techniques in large scale laser facilities, the echelon free induced spatial incoherence （EFISI） technique is selected to accomplish the beam uniform irradiation in the angular multiplexed high power excimer laser system. In this way, measurements on dynamic uniformity of the seed beam after three paths amplification of pre-amplifierl and double paths amplification of pre-amplifier2 with the use of partial coherence scattering seed and strict optical image relaying. Experimental results indicate that the uniformity of scattering seed is relatively kept owing to beam smoothing by EFISI technique. Typically, the nonuniformity of the beam after pre-amplifierl amplification is 2. 04%, and after pre-amplifier2 amplification is 1.96%. Meanwhile, the results mentioned above show that the technique adapts to the high power XeC1 excimer laser systems.

关 键 词：激光光学 准分子激光 角多路系统 光束平滑 无阶梯诱导空间非相干 像传递 

分 类 号：TN248.2[电子电信—物理电子学]