太赫兹折叠波导慢波结构的设计与微加工(英文)  

Design and microfabrication of folded waveguide circuit for THz TWT

作　　者：王亚军[1,2] 陈樟[1,2] 程焰林[1] 施志贵[1] 

机构地区：[1]中国工程物理研究院,电子工程研究所,四川绵阳621900 [2]中国工程物理研究院,太赫兹研究中心,四川绵阳621900

出　　处：《红外与毫米波学报》2014年第1期62-67,共6页Journal of Infrared and Millimeter Waves

基　　金：Supported by Advance Research Program of China Academy of Engineering Physics

摘　　要：从行波管工作的物理特性提出了一种获得折叠波导慢波结构参数的简单方法,给定工作频率和电压,能够获得折叠波导慢波结构的初始参数.设计了D波段的折叠波导结构来验证该方法,对其冷测特性如色散、耦合阻抗进行了分析.仿真结果表明,设计的折叠波导慢波结构在中心频率处具有较平缓的色散关系,在中心频率处耦合阻抗为3.5欧姆.在电子注电压为20.6 kV,电流为15 mA时,27 mm（50个周期）的折叠波导慢波结构在220 GHz具有13.5 dB的增益,3 dB带宽为11 GHz （213 ～224 GHz）.同时讨论了折叠波导慢波结构的微加工工艺,并通过UV-LIGA工艺获得了实验样品.A simple method based on the physical characteristics to get the main parameters of folded waveguide traveling wave tube （TWT） circuit is presented. Providing the operating frequency and beam voltage, the authors can obtain the ini- tial structural parameters of the FWTWT. A D-band folded waveguide circuit was used to verify this method. The cold char- acteristics including dispersion relation and interaction impedance were analyzed. The simulation results show good agree- ment with their theory formula analysis. The folded waveguide slow-wave structure has fiat dispersion relation, fairly high interaction impedance about 3.5 ohms at the center frequency of 220 GHz. The large signal performance of 27 mm （ 50 pe- riods） folded waveguide circuit was predicted. Simulations show the nonlinear gain is 13.5 dB at 220 GHz where beam volt- age and current are 20.6 kV and 15 mA, respectively. A saturated 3 dB bandwidth is 11 GHz （213 -224 GHz）. The Mi- crofabrication process to produce the folded waveguide circuits was discussed. The first example of the folded waveguide cir- cuit was fabricated by UV-LIGA process.

关 键 词：行波管 折叠波导 仿真 THZ辐射 

分 类 号：TN129[电子电信—物理电子学]