静力水准传感器中厚膜陶瓷电容传感器的研制  

Development of thick film ceramic capacitor in hydrostatic levelling sensor

作　　者：何晓业[1] 汪鹏[1] 许少峰[1] 王巍[1] 

机构地区：[1]中国科学技术大学国家同步辐射实验室,合肥230029

出　　处：《中国科技论文》2014年第1期40-44,共5页China Sciencepaper

基　　金：高等学校博士学科点专项科研基金资助项目(20123402110002)

摘　　要：为研制可用于粒子加速器等大科学工程的高精度静力水准传感器,结合国内电容微位移测量技术,完成厚膜陶瓷电容的结构设计。针对参数设计,采用正交实验法和Ansoft Maxwell有限元仿真软件的优化方法,完成了电容传感器的制备及样机的测试。测试实验结果表明传感器具有2.608 5%的线性度。In order to develop high precision hydrostatic levelling sensor which can be used in particle accelerator or other science projects,a capacitor with thick film ceramic structure has been designed combined with the internal capacitive micro-displacement measuring technology.The optimal parameters are designed using orthogonal experiment method and finite element simulation by the Ansoft Maxwell software.Then a capacitive sensor is developed and tested.The test shows that the sensor has a linearity of 2.608 5%.

关 键 词：静力水准传感器 厚膜电容 正交实验 ANSOFT Maxwell软件 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]