微磨削锥塔结构光滑表面的自适应方向检测与微加工精度  

Adaptive-orientation measurement and micro-machining accuracy of micro-ground pyramid-structured smooth surface

作　　者：谢晋[1] 刘旭冉[1] 吴可可[1] 李萍[1] 卢泳贤 

机构地区：[1]华南理工大学机械与汽车工程学院,广东广州510640

出　　处：《光学精密工程》2014年第2期376-382,共7页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.51075156)

摘　　要：用白光干涉检测(WLI)法检测微结构表面形貌时,其光滑结构面和边角数据很容易丢失,因此本文提出了自适应方向WLI检测法。该方法分别沿着每个微斜面法向进行自适应方向检测,评价分析其面形、特征轮廓和特征点的加工精度。首先,采用#3000金刚石砂轮微细尖端在Si表面加工出高度为50μm、宽度为56μm且光滑的微锥塔结构。然后,利用四次检测点云对微磨削表面进行拼接与重建。最后,分析面形误差、特征轮廓误差和特征点误差。实验显示:自适应方向WLI检测可以重构出完整的微锥塔结构表面,微磨削的面形误差为5.3μm,表明该微磨削技术可以确保微锥塔结构光滑Si表面的加工精度。但是,对微锥塔结构表面特征轮廓误差及特征点误差的评价表明,特征轮廓误差高达7.7μm,而特征点误差约为15μm,约为面形误差的3倍。分析认为这些误差是由微金刚石砂轮V形尖端磨钝及微磨粒钝化造成的。When a White Light Interferometry （WLI） is used to measure the micro-structured surface topography,the measured points on smooth micro-structured surfaces and edges are easy to lose.Therefore,an adaptive-orientation WLI was proposed.The method measured each steep surface along its near normal-orientation for the evaluation of its surface shape,feature profile and micro-machining accuracy.First,a # 3000 diamond wheel V-tip was employed to fabricate a micro-pyramid-structure Si surface with a depth of 50 μm and a width of 56 μm.Then,four adaptive-orientation measured point clouds were used to splice and reconstruct whole micro ground surface.Finally,the microground form error,feature profile error and the feature point error were investigated.Experiments show that the adaptive-orientation measurement can reconstruct integrated micro-pyramid-structured surface and the form error is 5.3 μm,which means that the micro-grinding may assure the machining accuracy of micro-pyramid-structured Si surface.In contrast,the evaluation for the feature profiles and feature points of a micro-pyramid-structure indicates that the feature profile error reaches 7.7μm,and the feature point error is about 15 μm,which is about 3 times of its form error.It suggests that these errors come from the passivations of diamond wheel V-tip and micro grains.

关 键 词：白光干涉术 自适应方向检测 微结构表面 微磨削精度 

分 类 号：TH744.3[机械工程—光学工程] TG115.5[机械工程—仪器科学与技术]