纳米金属多层膜的变形与断裂行为及其尺寸效应  

SIZE EFFECTS ON DEFORMATION AND FRACTURE BEHAVIOR OF NANOSTRUCTURED METALLIC MULTILAYERS

作　　者：张金钰[1] 刘刚[1] 孙军[1] 

机构地区：[1]西安交通大学金属材料强度国家重点实验室,西安710049

出　　处：《金属学报》2014年第2期169-182,共14页Acta Metallurgica Sinica

基　　金：国家重点基础研究发展计划项目2010CB631003;国家自然科学基金项目51321003;51322104和51201123;高等学校学科创新引智计划B06025;中国博士后科学基金项目2012M521765资助~~

摘　　要：如何有效地协调和平衡材料强度与韧性之间的矛盾,大幅提高结构材料的损伤容限,是设计微观结构敏感性材料的巨大挑战.纳米金属多层膜材料由于其灵活可调控的微观结构特征以及优异的力学性能已成为目前高性能微元器件以及互连结构的核心材料体系,其服役过程中的变形损伤与断裂是导致系统失效的关键因素.本文结合当前国内外有关金属多层膜塑性变形与断裂行为研究的最新进展,阐述了金属多层膜(微柱体)微观结构-尺寸约束-服役性能三者之间的关联性,揭示了金属多层膜(微柱体)变形与断裂模式的内在规律及机制,并对金属多层膜研究的发展趋势进行了展望.How to defeat the conflict of strength vs toughness and achieve unprecedented levels of damage tolerance within structural materials is a great challenge for designing microstrueture-sensitive materials. The nano- structured metallic multilayers （NMMs） are widely used as essential components of high performance microelec- tronics and interconnect structures owing to their smart, tunable internal features and their outstanding mechanical properties. The deformation and fracalre of NMMs during their service processes has been identified as an impor- tant factor influencing their reliability. The present authors had systematically investigated the size and interface ef- fects on the mechanical properties, such as hardness/strength, tensile ductility, fracture toughness, deformation and fracture mechanisms of Cu/X （X=Cr, Nb, Zr） nanolayered films/rnicropillars, in addition to their microstructure evolution. In this paper, based on these experimental results achieved by the present authors, as well as the pro- gresses at home and abroad made in the deformation and fracture behavior of NMMs, the correlation of microstructure-size constraint-mechanical performance in NMMs （and nanolayered micropillars） is reviewed, and the universities in their deformation and fracture modes and the related mechanisms are revealed. Finally, a brief prospect on the studies of NMMs in future in the light of manipulation of the internal features, origin and dynamics of disloca- tions and the high performance of NMMs at extreme is discussed.

关 键 词：纳米金属多层膜 塑性变形 断裂行为 尺寸效应 界面中图法 

分 类 号：TG113[金属学及工艺—物理冶金]