物理气相传输法生长氧化锌晶体  

Growth of ZnO Crystal by Physical Vapor Transport Method

作　　者：马剑平[1] 刘洋[1] 藏源 

机构地区：[1]西安理工大学电子工程系,西安710048

出　　处：《人工晶体学报》2014年第1期38-41,52,共5页Journal of Synthetic Crystals

基　　金：陕西省教育厅科学技术专项资金(08JK376)

摘　　要：以高纯氧化锌粉为升华源,采用物理气相传输法(PVT)法在1500℃下生长出了ZnO多晶体,生长速率达0.24 mm/h。样品XRD测试和拉曼分析表明,无籽晶自发成核生长的ZnO多晶体不仅具有六方纤锌矿结构,而且具有c轴方向择优生长特征。实验结果表明了PVT法可以进行大尺寸ZnO晶体的生长,并且可以达到0.2 mm/h以上的生长速率。The ZnO crystal were prepared by physical vapor transport （PVT） method without seed using high purity zinc oxide powder as sublimation source at high temperature about 1500 ℃, and it＇s growth rate was higher than 0.24 mm/h. The XRD results and Raman analysis of the grown sample show that the ZnO crystal grown without seed not only has wurtzite structure, but also has the direction of the c-axis preferred growth characteristics. The results suggest that a seed crystal assisted nucleation PVT growth is expected to be a novel crystal growth technique for producing ZnO single crystals and substrates with more than 0.2 mm/h growth rate by adjusting process parameters.

关 键 词：ZNO晶体 物理气相传输 生长 

分 类 号：O78[理学—晶体学]