压电陶瓷微位移器及其驱动电源的研制  

Development of PZT Micro-displacement Actuator and Power Supply

作　　者：王永红[1] 王硕[1] 马蛟 梁恒[1] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,安徽合肥230009

出　　处：《实验室研究与探索》2013年第12期68-71,156,共5页Research and Exploration In Laboratory

基　　金：国家自然科学基金项目(51075116);安徽省国际科技合作计划资助项目(12030603012)

摘　　要：针对相移干涉测量系统中微位移的要求,研制了一种新型压电陶瓷微位移器及其驱动电源,该驱动电源采用集成功率运算放大器配合外围器件组成直流放大式结构,能够有效解决输出电压的非线性问题,减少自激现象,提高系统的稳定性。对研制的压电陶瓷微位移器进行了实验标定。经测试,研制的驱动电源具有驱动能力强、线性度好、重复性好等特点。干涉实验验证了研制的压电陶瓷微位移器性能的可靠性和位移的精确性。PZT micro-displaeenlent actuator is the key component in phase shift interference technique. For the requirements of micro-displacement in phase shifting interferometry system, a new type of PZT miero-displacement actuator and Power Supply were developed. The Power Supply, composed of DC amplification structure hv using integrated power operational amplifie and a small number of peripheral devices , can effectively solve the nonlinear prohlems of output voltage, reduce the phenomenon of self-excited, and improve system stability. By experimental calibration testing, the unique features of tile power supply are low ripple, strongly driving capability and fine stabling. The experiment resuhs have shown the effectiveness and advantages of the PZT micro-displacement actuator.

关 键 词：压电陶瓷微位移器 驱动电源 相移 

分 类 号：TN249[电子电信—物理电子学]