多晶薄膜X-射线衍射  

Powder X-Ray Diffraction for the Pleomorphic Thin Films

作　　者：丛秋滋[1] 欧阳明安[1] 于德洋[1] 张平余[1] 赵家政[1] 

机构地区：[1]中国科学院兰州化学物理研究所固体润滑开放研究验实室

出　　处：《固体润滑》1991年第2期135-142,共8页

基　　金：国家自然科学基金资助课题。

摘　　要：作者在普通X-射线衍射仪上实施了样品倾斜X-射线衍射(STD)技术,不需要专用薄膜附件(TFA)也能很好地进行薄膜结构的测定,并且给出其衍射能量方程和方位角方程,从而使理论、实验和结构解析结合为一体。目前,应用该技术已经成功地解决了一些其它简便方法所无法解决的诸如物相纵向分布变化测量等问题。本文还通过几种摩擦学用膜的测定结果阐明了该技术的应用及功能。The sample-tilting X-ray diffraction (STD) technique was performed on the conventional X-ray diffractometer in this paper. Using this technique, structure of thin film can be detected without special film attachment (TFA). Authors also developed a diffraction intensity equation and an azimuth equation, which can theoritically character the habove technique. This method has been successfully used for solving some pro- blems of structure, which were unsolved by other simple methods such as longitudinal distributions of phases. The features of this technique were demonstrated with some application examples and came to the following conclusions: a. The application of STD technique has extended the function of X-ray diffraction. b. The STD technique is suitable for detection of phase structure of thin film materials. c. The measurement of longitudinal distribution change of the phase structure can be performed by using STD technique.

关 键 词：多晶薄膜 X-射线衍射 相结构 测量 

分 类 号：O484.5[理学—固体物理]