Controlling the surface buckling wrinkles by patterning the material system of hard-nano-film/soft-matter-substrate  

作　　者：WU Dan YIN YaJun XIE HuiMin SHANG YuanFang LI ChuanWei WU LiFu DAI XiangLu 

机构地区：[1]Key Laboratory of Applied Mechanics (AML), Department of Engineering Mechanics, Tsinghua University [2]The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University

出　　处：《Science China(Physics,Mechanics & Astronomy)》2014年第4期637-643,共7页中国科学：物理学、力学、天文学（英文版）

基　　金：supported by the National Basic Research Program of China(Grant Nos.2010CB631005 and 2011CB606105);the National Natural Science Foundation of China(Grant Nos.11232008,91216301,11072125 and 11272175);Tsinghua University Initiative Scientific Research Program

摘　　要：Wrinkling and buckling of nano-films on the compliant substrate are always induced due to thermal deformation mismatch.This paper proposes effective means to control the surface wrinkling of thin film on the compliant substrate,which exploits the curvatures of the curve cracks designed on the stiff film.The procedures of the method are summarized as:1)curve patterns are fabricated on the surface of PDMS(Polydimethylsiloxane)substrate and then the aluminum film with the thickness of several hundred nano-meters is deposited on the substrate;2)the curve patterns are transferred onto the aluminum film and lead to cracking of the film along the curves.The cracking redistributes the stress in the compressed film on the substrate;3)on the concave side of the curve,the wrinkling of the film surface is suppressed to be identified as shielding effect and on the convex side the wrinkling of the film surface is induced to be identified as inductive effect.The shielding and inductive effects make the dis-ordered wrinkling and buckling controllable.This phenomenon provides a potential application in the fabrication of flexible electronic devices.Wrinkling and buckling of nano-films on the compliant substrate are always induced due to thermal deformation mismatch.This paper proposes effective means to control the surface wrinkling of thin film on the compliant substrate,which exploits the curvatures of the curve cracks designed on the stiff film.The procedures of the method are summarized as：1）curve patterns are fabricated on the surface of PDMS（Polydimethylsiloxane）substrate and then the aluminum film with the thickness of several hundred nano-meters is deposited on the substrate;2）the curve patterns are transferred onto the aluminum film and lead to cracking of the film along the curves.The cracking redistributes the stress in the compressed film on the substrate;3）on the concave side of the curve,the wrinkling of the film surface is suppressed to be identified as shielding effect and on the convex side the wrinkling of the film surface is induced to be identified as inductive effect.The shielding and inductive effects make the dis-ordered wrinkling and buckling controllable.This phenomenon provides a potential application in the fabrication of flexible electronic devices.

关 键 词：mismatch of thermal deformation wrinkling and buckling inductive effect shielding effect 

分 类 号：TB304[一般工业技术—材料科学与工程]