一种新型四维加速度传感器研究  

Research of a new type four-dimensional acceleration sensor

作　　者：李敏[1] 刘俊[1] 吕华溢[1] 秦岚[1] 

机构地区：[1]重庆大学光电技术及系统教育部重点实验室,重庆400030

出　　处：《传感器与微系统》2014年第3期48-51,共4页Transducer and Microsystem Technologies

基　　金：重庆市自然科学基金资助项目(CSTC2012JJA40024);中央高校基本科研业务费专项资金资助项目(1061120131205)

摘　　要：针对高档数控机床动态振动特性的健康监测需要,提出并研究了一种单惯性质量块的压电式四维加速度传感器。介绍了传感器的结构和工作原理,推导了其数学模型,运用ANSYS有限元软件对传感器的静态灵敏度、维间耦合和动态固有频率、维间耦合等特性进行了仿真研究。研究结果表明:该四维加速度传感器能够实现四维加速度的传感,线性度好、刚度高、理论固有频率大于25kHz,无静态维间耦合,低动态维间耦合,满足传感器的设计目标。Aiming at need of health monitoring on dynamic vibration characteristics of high grade digitally controlled machine tools,a single inertial mass piezoelectric four-dimensional acceleration sensor is put forward.Structure and working principle of four-dimensional acceleration sensor are introduced,and its mathematic model is derived,and use ANSYS finite element software to carry out simulation study on static sensitivity,dimension coupling and dynamic natural frequency,dimension coupling.Research results show that the sensor can realize sensing of four-dimensional acceleration,it has good linearity,high rigidity,and theoretical natural frequency is more than 25 kHz,no static cross dimension coupling and low dimension coupling,which can satisfy design target of sensor.

关 键 词：四维 加速度传感器 压电原理 

分 类 号：R318[医药卫生—生物医学工程]