太赫兹微测辐射热计的设计、仿真与制备  

Design, simulation and manufacture of THz microbolometer

作　　者：苟君[1] 蒋亚东[1] 王军[1] 喻磊[1] 黎威志[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,成都610054

出　　处：《科学通报》2014年第8期727-732,共6页Chinese Science Bulletin

基　　金：国家自然科学基金(61006036;61235006)资助

摘　　要：为提高太赫兹(THz)微测辐射热计的探测灵敏度,优化设计探测单元的微桥结构:增加10nm的镍铬(NiCr)金属薄膜用作THz辐射吸收层并增大探测单元面积.采用IntelliSuite软件建立不同单元尺寸、不同桥腿宽度的微桥结构的有限元分析模型,进行力学与热学仿真.力学仿真表明,增大探测单元面积,形变明显增加;增大桥腿宽度可以小幅改善形变.热学仿真表明,通过增大探测单元面积或减小桥腿宽度可以提升桥面温升.制备出基于不同探测单元结构的THz微测辐射热计焦平面阵列,探测单元的实际形变情况与仿真结果基本相符.单元面积75?m×75?m,桥腿宽度1.3?m的微桥结构具有较好的力学与热学性能,适合用作THz微测辐射热计的探测单元结构.The authors made optimal design on micro-bridge structure of uncooled microbolometer operated in terahertz （THz） range to improve detection sensitivity. A nickel-chromium （NiCr） thin film with a thickness of 10 nm acting as THz absorption layer was added and the absorption area of the cell was expanded. IntelliSuite was used for mechanical and thermal simulations by finite element analysis of micro-bridge structures with different unit sizes and different bridge leg widths. Results revealed that deformation was significantly increased with the increased cell area. A small range decrease of deformation was achieved by using wider legs. Temperature rise of bridge was enhanced by increasing the cell area and reducing the width of bridge legs. THz microbolometer focal plane arrays based on the designed structures were manufactured and the results agreed well with the simulations. The structure with a unit size of 75 gmx75 μm and a leg width of 1.3 μm was suitable for THz microbolometer for its good mechanical and thermal properties.

关 键 词：太赫兹微测 辐射热计 力学仿真 热学仿真 制备 

分 类 号：TN215[电子电信—物理电子学]