一种MEMS检波器设计及其性能测试  

Design of a MEMS geophone and its parameters testing

作　　者：王维波[1] 陈文杰[1] 王春田 王子阳[1] 盛冠群[1] 

机构地区：[1]中国石油大学(华东),山东青岛266580 [2]中石化地球物理公司胜利分公司

出　　处：《物探装备》2014年第1期1-4,共4页Equipment for Geophysical Prospecting

基　　金：中央高校基本科研业务费专项资金资助;13CX02098A;青岛经济技术开发区重点科技计划发展项目;2013-1-54

摘　　要：与常规的动圈式检波器不同,目前物探行业使用的DSU等数字式MEMS检波器无法采用传统的检波器性能测试仪进行性能参数测试。为研究MEMS检波器性能参数测试方法和性能特点,采用一种高性能MEMS加速度计芯片SF1500S,设计了一个模拟信号输出的MEMS检波器,设计了配套的数据采集器和处理软件,并对其进行频率特性、畸变等性能测试。The parameters of digital MEMS geophones used for current geophysical exploration, such as DSU series can not be measured by geophone tester, which is different with conventional moving coil geophones. In order to study the parameters testing method and performance characteristics of MEMS geophone, a MEMS accelerator of high performance is used to design a MEMS geophone with analog output. A specified data recorder and processing soft- ware are designed for the MEMS geophone, and its frequency characteristics and distortion are tested.

关 键 词：MEMS检波器 SFl500S检波器测试 畸变 

分 类 号：P631.436[天文地球—地质矿产勘探]