硅化铂红外焦平面探测器性能改进技术分析  

Technologies of performance improvement for platinum silicide infrared focal plane array

作　　者：康冰心[1] 蔡毅[1,2] 王岭雪[1] 薛唯[1] 高岳[1] 

机构地区：[1]北京理工大学光电学院光电成像技术与系统教育部重点实验室,北京100081 [2]中国兵器科学研究院,北京100089

出　　处：《红外与激光工程》2014年第3期742-748,共7页Infrared and Laser Engineering

基　　金：高等学校博士学科点专项科研基金(20131101110024)

摘　　要：硅化铂红外焦平面探测器具有响应光谱宽、规模大、均匀性好、时间稳定性高、制造成本低等优点,在多/宽光谱成像、激光探测、天文观测、医疗检测等领域具有应用潜力,但NETD 100 mK的灵敏度对其广泛应用有一定的限制。文中从该探测器的量子效率和填充因子两方面总结和分析了国内外的改进技术,重点分析了光腔结构、多孔硅结构、重掺杂P+和合适硅化铂膜厚提高量子效率的机理,并定量比较了提升幅度:多孔硅结构提升幅度最大,在波长4μm处的量子效率可达27%;相比内线转移CCD,电荷扫描器件、曲流沟道CCD和混合读出结构均能改善填充因子,其中混合读出结构的填充因子可提高为80%。微透镜列阵能将填充因子提高到85%以上。Platinum silicide infrared focal plane array is characterized by several advantages such as wide spectral range, large array, good uniformity, high time stability and low cost. It shows application potential in multispectral/wide-spectrum imaging, laser detection, astronomical observation and medical monitor. However, 100 mK′s sensitivity（NETD） is the main limitation on wide application. The technologies of improving performance of platinum silicide infrared detector were summarized. Optical cavity structure, PtSi/porous Si schottky barrier, doping-spike P＋ and suitable PtSi film thickness were effective measures to increase quantum efficiency. Porous silicon structure improved quantum efficiency as much as 27% at 4μm wavelength. Comparing with interline transfer CCD, the fill factor of the FPAs was raised up to 50%-80% using charge sweep device, meander channel CCD or hybrid schottky structure. In addition,microlens array was the most efficient method to augment the fill factor higher than 85%.

关 键 词：硅化铂红外焦平面列阵 量子效率 填充因子 读出电路 微透镜列阵 

分 类 号：TN215[电子电信—物理电子学]