考虑悬浮哑元的结构化随机行走电容提取算法  

A Hierarchical Floating Random Walk Algorithm for Capacitance Extraction Considering Floating Dummies

作　　者：孙泽武[1] 朱恒亮[1] 曾璇[1] 

机构地区：[1]复旦大学专用集成电路与系统国家重点实验室,上海201203

出　　处：《复旦学报（自然科学版）》2014年第1期9-16,23,共9页Journal of Fudan University：Natural Science

基　　金：国家自然科学基金资助项目(61006030;61106032);国家十二五科技重大专项资助项目(2011ZX01035-001001-003)

摘　　要：为了解决化学机械抛光(CMP)工艺带来的芯片平整性问题,集成电路制造工艺越来越多地选择向电路版图中填充金属哑元.然而,电路中的大量金属哑元大幅增加了互连线的寄生电容值.在提取含大量哑元电路的寄生电容时,传统寄生电容提取算法的效率会受到明显影响.提出了一种基于随机行走的寄生电容提取算法,利用区域分解技术,将哑元区域划分为多个子区域,通过对具有相同结构的标准子区域建立宏模型,并计算其马尔可夫转移矩阵,利用转移概率实现哑元区域内的"行走".同传统算法相比,在保证提取精度的前提下,方法具有更快的提取速度.此外,宏模型的建立可以避免对标准哑元结构的重复计算,提高计算结果的复用率.In order to enhance CMP planarity, dummy fills are extensively inserted into circuits. However the presence of these floating dummies has a significant impact on the values of interconnect capacitances. When extracting capacitance of circuits including large amount of dummies, conventional algorithms need too much computation on dummy array. An efficient algorithm based on floating random walk is proposed to improve the efficiency and accuracy for extracting capacitance with floating dummies. By using domain decomposition technique, we partition the dummy area into many subdomains, and only the standard subdomains need to compute their Markov transition matrix. When composing circuit with standard subdomains, conventional random walks are replaced with random transitions, which has a much lower time expense. Compared with existing algorithm based on FRW, our method exhibits lower computational cost with the same accuracy.

关 键 词：电容提取 悬浮哑元 随机行走 区域分解 

分 类 号：TM344.1[电气工程—电机]