硬脂酸质子交换X切LiNbO3光波导的制备技术研究  

Fabrication of Proton-exchanged X-cut LiNbO_3 Optical Waveguide Using Stearic Acid

作　　者：陈硕 刘占元 刘鹏飞[2] 陈开鑫[2] 

机构地区：[1]国网智能电网研究院,北京100192 [2]电子科技大学通信与信息工程学院,成都611731

出　　处：《半导体光电》2014年第1期65-68,148,共5页Semiconductor Optoelectronics

摘　　要：利用无毒、无腐蚀性的硬脂酸作为交换质子源,研究了在X切LiNbO3晶片上制作单模条形光波导的工艺技术。通过对平板光波导的交换及退火特性的研究,确定了获得单模条形光波导的工艺参数,制作并测试了条宽不等的X切Y传LiNbO3单模条形光波导。结果表明该工艺条件下制作的条宽为6μm的单模波导实现了小于1dB/cm的传输损耗,为采用硬脂酸作为交换质子源研制X切Y传LiNbO3集成光波导器件奠定了基础。Investigated was the technology for fabricating single mode optical channel waveguide on X-cut LiNbO3 substrate by using non-toxic and non-corrosive stearic acid melts. The technical conditions for realizing such an optical channel waveguide were obtained by investigating exchange conditions and annealing properties of a planar waveguide. And the waveguides along Y direction with different channel width were fabricated on X-cut LiNbO3 substrate. The measurement results show that the propagation loss less than 1 dB/cm is realized for the single mode waveguide with the width of 6μm.

关 键 词：光波导 质子交换 硬脂酸 铌酸锂 

分 类 号：TN256[电子电信—物理电子学]