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机构地区:[1]School of Physics Science and Technology, Anshan Normal University [2]School of Physics, Huazhong University of Science and Technology [3]School of Science & Beijing Key Laboratory of Environmentally Harmful Chemicals Assessment,Beijing University of Chemical Technology
出 处:《Chinese Physics B》2014年第3期418-426,共9页中国物理B(英文版)
基 金:Project supported by the National Natural Science Foundation of China(Grant Nos.11275007,11105057,11175023,and 11275039);the Program for Liaoning Excellent Talents in University,China(Grant No.LJQ2012098)
摘 要:We benchmark and analyze the error of energy conservation (EC) scheme in particle-in-cell/Monte Carlo (PIC/MC) algorithms by simulating the radio frequency discharge. The plasma heating behaviors and electron distributing functions obtained by one-dimensional (1D) simulation are analyzed. Both explicit and implicit algorithms are checked. The results showed that the EC scheme can eliminated the self-heating with wide grid spacing in both cases with a small reduction of the accuracies. In typical parameters, the EC implicit scheme has higher precision than EC explicit scheme. Some "numerical cooling" behaviors are observed and analyzed. Some other errors are also analyzed. The analysis showed that the EC implicit scheme can be used to qualitative estimation of some discharge problems with much less computational resource cost without much loss of accuracies.We benchmark and analyze the error of energy conservation (EC) scheme in particle-in-cell/Monte Carlo (PIC/MC) algorithms by simulating the radio frequency discharge. The plasma heating behaviors and electron distributing functions obtained by one-dimensional (1D) simulation are analyzed. Both explicit and implicit algorithms are checked. The results showed that the EC scheme can eliminated the self-heating with wide grid spacing in both cases with a small reduction of the accuracies. In typical parameters, the EC implicit scheme has higher precision than EC explicit scheme. Some "numerical cooling" behaviors are observed and analyzed. Some other errors are also analyzed. The analysis showed that the EC implicit scheme can be used to qualitative estimation of some discharge problems with much less computational resource cost without much loss of accuracies.
关 键 词:particle-in-cell/Monte Carlo simulation energy conservation grid heating discharging simulation
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