Improving light trapping and conversion efficiency of amorphous silicon solar cell by modified and randomly distributed ZnO nanorods  

作　　者：贾志楠 张晓丹 刘阳 王延峰 樊君 刘彩池 赵颖 

机构地区：[1]Institute of Photo-Electronics Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-Electronics Thin Film Devices and Technology of Tianjin [2]School of Materials Science and Engineering, Hebei University of Technology [3]School of Information and Engineering, Hebei University of Technology

出　　处：《Chinese Physics B》2014年第4期444-449,共6页中国物理B（英文版）

基　　金：Project supported by the National Basic Research Program of China(Grant Nos.2011CBA00706 and 2011CBA00707);the High-Technology Research and Development Program of China(Grant No.2013AA050302);the Science and Technology Support Program of Tianjin City,China(Grant No.12ZCZDGX03600);the Major Science and Technology Support Project of Tianjin City,China(Grant No.11TXSYGX22100);the Specialized Research Fund for the Ph.D.Program of Higher Education,China(Grant No.20120031110039)

摘　　要：Three-dimensional （3D） nanostructures in thin film solar cells have attracted significant attention due to their appli- cations in enhancing light trapping. Enhanced light trapping can result in more effective absorption in solar cells, thus leading to higher short-circuit current density and conversion efficiency. We develop randomly distributed and modified ZnO nanorods, which are designed and fabricated by the following processes： the deposition of a ZnO seed layer on sub- strate with sputtering, the wet chemical etching of the seed layer to form isolated islands for nanorod growth, the chemical bath deposition of the ZnO nanorods, and the sputtering deposition of a thin Al-doped ZnO （ZnO：Al） layer to improve the ZnO/Si interface. Solar cells employing the modified ZnO nanorod substrate show a considerable increase in solar energy conversion efficiency.Three-dimensional （3D） nanostructures in thin film solar cells have attracted significant attention due to their appli- cations in enhancing light trapping. Enhanced light trapping can result in more effective absorption in solar cells, thus leading to higher short-circuit current density and conversion efficiency. We develop randomly distributed and modified ZnO nanorods, which are designed and fabricated by the following processes： the deposition of a ZnO seed layer on sub- strate with sputtering, the wet chemical etching of the seed layer to form isolated islands for nanorod growth, the chemical bath deposition of the ZnO nanorods, and the sputtering deposition of a thin Al-doped ZnO （ZnO：Al） layer to improve the ZnO/Si interface. Solar cells employing the modified ZnO nanorod substrate show a considerable increase in solar energy conversion efficiency.

关 键 词：random ZnO nanorod light trapping Al-doped ZnO solar cells 

分 类 号：TM914.4[电气工程—电力电子与电力传动] TN011[电子电信—物理电子学]