金刚石颗粒双阴极等离子溅射铬镀层显微结构研究  

Study on Microstructure of Cr-coated Diamond Processed by Ion Sputtering with Double Cathodes

作　　者：王超[1,2,3] 揭晓华[1,2,3] 刘烨[1,2,3] 徐江[1,2,3] 陶洪亮[1,2,3] 魏菊[1,2,3] 

机构地区：[1]广东工业大学材料与能源学院,广州510006 [2]南京航空航天大学材料科学与技术学院,南京210016 [3]广东奔朗新材料股份有限公司,佛山528313

出　　处：《人工晶体学报》2014年第2期361-364,374,共5页Journal of Synthetic Crystals

基　　金：粤港招标项目(2011243);广东省教育部产学研结合项目(2011B090400178)

摘　　要：通过FIB-SEM观察了镀覆温度为850℃双阴极等离子溅射镀铬金刚石的表面形貌;利用TEM、XPS分析了镀层厚度、微观结构及表层元素价态;在光学显微镜下观察酸洗后金刚石的镀层变化情况。结果表明,经双阴极等离子溅射镀覆后的金刚石在其表层形成了厚度约为500 nm的柱状结构镀层,镀层晶粒尺寸约为10 nm;酸洗后镀层仅出现轻微脱落,说明金刚石铬镀层十分致密。The surface morphology of the Cr-coated diamond processed through ion sputtering with double cathodes at 850 ℃ were observed by Focused ion beam-Scanning electron microscope thickness. Micro- structure and elements charge on surface of coating has been analyzed by transmission electron microscope and X-ray photoelectron spectroscopy analysis tests, together with observation of coatings corroded in acid solution by optical microscope. In this paper, the results of which demonstrate that there is a columnar- shaped coatings of 500 nm thick with grains of 10 nm in diameter after ion sputtering by double cathodes on diamond surface. The fact that a slight drop of coatings happening after acid solution indicates that the Cr-coated has a very compact structure.

关 键 词：双阴极等离子溅射 镀层 金刚石 

分 类 号：TQ153[化学工程—电化学工业]