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作 者:陈桦[1,2] 张国峰[1] 邱阳[1,2] 徐小峰[1] 王永良[1] 孔祥燕[1]
机构地区:[1]中国科学院上海微系统与信息技术研究所信息功能材料国家重点实验室,上海200050 [2]中国科学院大学,北京100039
出 处:《低温物理学报》2014年第2期122-125,共4页Low Temperature Physical Letters
基 金:中国科学院战略性先导科技专项(B类))(批准号:XDB04010100)资助的课题~~
摘 要:在器件制备过程中,超导量子干涉器件(SQUID)和Josephson结的性能测试是非常重要是一个环节.设计一个合理高效的测试方法对于提高测试效率及可靠性非常必要.本文采用多路复用技术,设计了8通道测试电路,减小了电路面积及所需测试箱体积,降低了液氦使用成本并极大提高了测试一致性.本文对测试箱、器件放置及测试杆连接等进行了设计,成功搭建了一套多个Josephson结测试的系统,并根据常温验证的测试结果对电路进行了优化处理.最后,对多个结进行低温测试验证了该测试系统的可行性与优越性.In device fabrication, the performance evaluation of superconducting quantum interference device (SQUID) and Josephson junction is very important. It is necessary to design a reasonable and efficient method to improve the testing efficiency and reliability. In this work, the multiplexing technique is used to design an 8-channel testing circuit, which not only reduce the circuit area and the volume of testing box, but also reduce the liquid heli- um cost during cooling-heating cycle. By designing the testing probe, including the circuit components distribution in the test box and the wire connection, we successfully build a system for 8 Josephson junctions. A verification test at room temperature is also carried out to optimize the test circuit. Finally, 8 junctions were test at low temperature and further improvement is also discussed.
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