模数≤0.06mm的微行星齿轮减速器的CAD/CAM技术  

CAD/CAM technology applied in micro planetary gear reducer whose modulus is equal to or smaller than 0.06 mm

作　　者：张卫平[1] 陈文元[1] 范志荣[1] 徐正福[1] 

机构地区：[1]上海交通大学信息存储研究中心薄膜与微细加工国家教委开放实验室,上海200030

出　　处：《机械设计》2000年第12期14-16,共3页Journal of Machine Design

基　　金：国家"九五"重点科技攻关项目! (96745 - 0 1 - 0 1 )

摘　　要：微机电系统 (MEMS)是近年来兴起的一门新兴技术 ,微行星齿轮减速器是微机电系统中的重要器件。在模数≤ 0 .0 6mm的微行星齿轮减速器的研制中 ,引入CAD/CAM技术 。Micro Electro Mechanical System (MEMS) is a course of new technology rising in recent years. Micro planetary gear reducer is the important part in MEMS. CAD/CAM technology has been introduced to the research of micro planetary gear reducer whose modulus equals to or smaller than 0 06 mm, and the model machine has been successfully designed and manufactured.

关 键 词：微行星齿轮减速器 CAD CAM 

分 类 号：TH132.46[机械工程—机械制造及自动化] TH132.425