直接数字频率合成技术在四极质谱仪射频电源中的应用  

Application of direct digital frequency synthesis technology in radio-frequency power of quadrupole mass spectrometer

作　　者：李凯 李明 唐兴斌 梁斌 

机构地区：[1]钢研纳克检测技术有限公司,北京100081

出　　处：《冶金分析》2014年第2期20-24,共5页Metallurgical Analysis

基　　金：科技部国家重大科学仪器设备开发专项(2011YQ140147)

摘　　要：四极质谱仪射频电源的驱动电路大多采用模拟电路搭建而成，频率相对固定。然而，由于射频电源在驱动不同负载时所需的频率各不相同，因此，若要驱动不同负载，必须改变模拟器件的硬件参数，过程比较繁琐。针对此不足，研发了一种新型的射频电源的频率发生电路。该电路结合了直接数字频率合成（DDS）技术和高级精简指令集（ARM）型微控制器，通过上位机配置，可输出频率和相位可调的正弦波信号，频率可调范围为0～15MHz，分辨率是0．02328Hz。实验表明，该频率发生电路结构简洁，性能稳定、可靠，已成功用于四极质谱仪射频电源中。The radio-frequency power drive circuits of the quadrupole mass spectrometer are mostly built in the analog design with relatively fixed frequencies. However, because the radio-frequency power required different frequencies when driving different loads, it s necessary to change the hard- ware parameters of the analog components, which is a cumbersome process. To overcome this defect, a novel frequency-generating circuit for the radio-frequency power was developed. The design com- bined the direct digital frequency synthesis （DDS） technology and the advanced RISC machine （ARM） microcontroller, and after being configured on the host computer, could output frequency- and phase- adjustable sine wave signals, whose frequency was adjustable from 0 to 15 MHz and whose resolution was 0. 023 28 Hz. Experiments showed that the frequency-generating circuits had simple structures and stable and reliable performance. It has been successfully used in the radio-frequency power of the quadrupole mass spectrometer.

关 键 词：直接数字频率合成技术 高级精简指令集型微控制器 射频电源 四极质谱仪 

分 类 号：TH843[机械工程—仪器科学与技术]