PET核孔膜蚀刻速率影响因素的研究  

Influence factors on etching rate of PET nuclear pore membrane

作　　者：左振中 吴振东[2] 屈国普[1] 梁海英[2] 鞠薇[2] 陈东风[2] 傅元勇[2] 

机构地区：[1]南华大学核科学技术学院,衡阳421001 [2]中国原子能科学研究院核物理研究所,北京102413

出　　处：《核技术》2014年第4期29-34,共6页Nuclear Techniques

摘　　要：核孔膜是通过重离子照射薄膜后进行化学蚀刻所得到的高性能过滤材料,蚀刻速率是影响高质量核孔膜制备的重要因素。本文探讨了不同蚀刻液浓度、温度以及重离子辐照能量对蚀刻速率的影响。利用140 MeV的32S离子在室温和真空条件下对4层堆叠的PET(polyethylene terephthalate)薄膜进行了辐照。在对辐照样品进行化学蚀刻期间采用电导法确定了径迹蚀刻速率Vt。结果表明:蚀刻速率与蚀刻温度呈指数相关,随蚀刻液浓度增加而线性增大;径迹蚀刻速率随能量损失率(离子能损)增大。研究确定,在入射32S能量为1.6 MeV·u-1时,NaOH浓度为1mol·L-1、蚀刻温度为85°C时最有利于形成圆柱形微孔。Background： The nuclear pore membrane is a kind of liquid filtration material manufactured by irradiation and chemical etching. Various conditions in etch process have a great influence on etch rate. Purpose： The influence factors of concentration and temperature of etch solution and the irradiation energy of heavy ions on etch rate was studied. Methods： Four layers of PET （polyethylene terephthalate） films were stacked together and were irradiated with 140-MeV 32S ions at room temperature under vacuum conditions. Utilizing conductivity measurement technique, the electrical current changes through the irradiated PET film were monitored during etching, from which the breakthrough time and therefore the track etching rate was calculated. Results： The results show that there is an exponential correlation between etch rate and temperature, and a linear correlation between etch rate and concentration. The track etching rate increases linearly with energy loss rate. Empirical formula for the bulk etching rate as a function of etchant concentration and temperature was also established via fitting of measurements, Conclusion： It is concluded that by using 1.6-MeV.u1 32S ions, PET nuclear pore membrane with cylindrical pore shape can be prepared at 85 ℃ with etchant concentration of 1 mol·L-1.

关 键 词：核孔膜 电导法 径迹蚀刻速率 体蚀刻速率 能量损失率 

分 类 号：TL99[核科学技术—核技术及应用]