32-site microelectrode modified with Pt black for neural recording fabricated with thin-film silicon membrane  

作　　者：CHEN SanYuan PEI WeiHua ZHAO Hui GUI Qiang TANG RongYu CHEN YuanFang FANG XiaoLei HONG Bo GAO XiaoRong CHEN HongDa 

机构地区：[1]State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences [2]Institute of Neural Engineering, Department of Biomedical Engineering, Tsinghua University

出　　处：《Science China(Information Sciences)》2014年第5期288-294,共7页中国科学（信息科学）（英文版）

基　　金：supported by National Basic Research Program of China(973 Program)(Grant Nos.2011CB9332-03,2011CB933102);National High-tech R&D Program of China(863 Program)(Grant No.2012AA030608);National Natural Science Foundation of China(Grant Nos.31070965,61036002,60976026,61076023,61178082,61078074)

摘　　要：Multi-electrode array is an important tool in the study of neural-network, cognition, remembrance, as well as brain-computer-interface, etc. Fork-like 32-site microelectrodes are developed with silicon. By use of integrated circuit technology, the length of the electrodes, the area of the recording sites, as well as the spaces between the sites are closely controlled. SiO2/SiNx/SiO2 composite dielectric membrane and Pt black are introduced to improve the characteristics of the electrodes. The whole thickness of the thin-film probe was 21 p.m. By combining the modifying process with the micro-fabrication method, this kind of silicon based microelectrode satisfies high-density recording and the performance characterization is evaluated by test in vitro and in vivo.Multi-electrode array is an important tool in the study of neural-network, cognition, remembrance, as well as brain-computer-interface, etc. Fork-like 32-site microelectrodes are developed with silicon. By use of integrated circuit technology, the length of the electrodes, the area of the recording sites, as well as the spaces between the sites are closely controlled. SiO2/SiNx/SiO2 composite dielectric membrane and Pt black are introduced to improve the characteristics of the electrodes. The whole thickness of the thin-film probe was 21 p.m. By combining the modifying process with the micro-fabrication method, this kind of silicon based microelectrode satisfies high-density recording and the performance characterization is evaluated by test in vitro and in vivo.

关 键 词：MICROELECTRODE brain-computer interface thin-film Si Pt black neural recording 

分 类 号：TQ127.2[化学工程—无机化工] TQ150