一种新型MEMS微电感制作工艺和模拟研究  

Fabrication Process and Simulation of a New Type Solenoid-type MEMS Inductor

作　　者：谈志杰 沈娇艳[1] 程新利[1] 王友清[1] 潘涛[1] 

机构地区：[1]苏州科技学院数理学院,江苏苏州215009

出　　处：《压电与声光》2014年第2期278-281,共4页Piezoelectrics & Acoustooptics

基　　金：江苏省产学研前瞻性联合研究基金资助项目(BY2011133);江苏省高校自然科学基础研究基金资助项目(08KJD430007)

摘　　要：采用光刻、干法刻蚀、电镀等微机电系统(MEMS)工艺设计了一种新型的带磁芯的螺线管微电感。采用COMSOL Multiphysics有限元软件,计算了不同频率交流载荷下的等效电阻、等效电感和阻抗随频率变化的关系。模拟结果表明,在1kHz^1MHz的频率范围内,其等效电感值基本不变,约为27nH,电阻值约为9Ω,射频模拟结果表明其共振频率为0.45GHz。A solenoid-type micro-inductor with magnetic core was designed with micro-electro mechanical sys- tems （MEMS） techniques such as dry etching, photolithography and electroplating. The equivalent series resist- ance, equivalent series inductance and impedance of the micro-inductor from different frequencies were simulated by finite element analysis （FEA） method with COMSOL Multiphysics software. It showed that the inductance was a- bout 27 nH and the resistance was about 9 Ω from 1 kHz to 1 MHz, and the RF simulation results showed that the self-resonant frequency was 0.45 GHz.

关 键 词：微机电系统(MEMS) 制作工艺 螺线管微电感 有限元模拟 COMSOL MULTIPHYSICS 

分 类 号：TM552[电气工程—电器] TN602[电子电信—电路与系统]