阴极离子镀AlCrN涂层化学元素面扫描与线扫描分析  

Plane and Line Scanning Analysis of AlCrN Coatings Synthesized by Cathode Ion Plating

作　　者：孔德军[1,2] 付贵忠[1] 王文昌[3] 张垒[1] 

机构地区：[1]常州大学机械工程学院,常州213016 [2]江苏省大型重载齿轮传动工程技术研究中心,常州213012 [3]常州大学石油化工学院,常州213164

出　　处：《真空科学与技术学报》2014年第3期235-240,共6页Chinese Journal of Vacuum Science and Technology

基　　金：江苏省科技支撑计划(工业)(No.BE2012066);中国学位与研究生教育学会研究课题(CI-2013Y07-OSI)

摘　　要：用阴极离子镀方法在TiC基金属陶瓷刀具表面制备了AlCrN涂层,通过扫描电镜、X射线衍射和能谱分析面扫描与线扫描等手段对AlCrN涂层组织结构和表面-界面化学元素分布进行了分析,并对其界面扩散结合机理进行了探讨。结果表明,TiC基金属陶瓷刀具由TiN、TiC和Ni组成,TiC和TiN为硬质相;AlCrN涂层表面均匀致密,由AlN和CrN组成,表面Al原子含量较高,形成了功能硬度梯度,耐磨性和抗氧化性能较好;涂层中化学元素分布均匀,在Ti、C、N、Al元素之间化学元素发生了扩散现象,与基体形成了冶金结合方式。The A1CrN coating was deposited by cathodic arc ion plating on substrate of TiC. The surfaces of the A1- CrN coating and its interface were characterized with scanning electron microscope, energy dispersive spectrometer and X- ray diffraction and the Mechanism of interfacical diffusion combination was discussed. The results show that thefairly uniform, compact A1CrN coatings significantly improve the wear-resistance and oxidation-resistance of the substrate. The A1N and CrN phases were found to coexist in the A1CrN coatings with Al-rich surfaces. The formation of a functional hardness gradientpossibly accounted for an enhancement of the wear-resistance and oxidation-resistance. The interfacial diffusion of Ti, C, N, and A1 resulted in metallurgical bonding and a strong interfacial adhesion.

关 键 词：阴极离子镀 AlCrN涂层 结合界面 面扫描 线扫描 

分 类 号：TG174.444[金属学及工艺—金属表面处理] TH117.1[金属学及工艺—金属学]